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Article – Journal of Nanoscience and Technology

Journal of Nanoscience and Technology, Volume 2,Issue 3,2016 Pages 181-185

Ammonia Sensing Performance of Nanostructure Cr Doped ZrO2 Thin Film Deposited by Spray Route
R.H. Bari*, S.B. Patil, S.B. Deshmukh

Nanostructured thin films of pure ZrO2 and Cr doped ZrO2 have been prepared on glass substrate at 350 °C using spray pyrolysis technique. The films were deposited by spraying the solution of CrO3 and ZrOCl2.8H2O having same concentration (0.05 M) in deionized water. Chromic oxide and Zirconium oxychloride were mixed at various volume ratios such as 3:97 %, 5:95 %, 7:93 % and 9:91 %. The films were annealed in air at 550 °C for an hour. These thin films were characterized by XRD, FE-SEM, TEM, SAED pattern and UV spectroscopy technique. The various gases were exposed on films in ambient air at different operating temperature. The Cr doped ZrO2 thin films showed maximum gas response to ammonia (S=96) for 500 ppm at 300 °C. The parameters like grain size, gas response, selectivity, detection limit, stability, response and recovery time were reported and discussed.

Keywords: Nanostructure; Spray Pyrolysis; Ammonia Gas; Sensitivity;